Air Products’ recent purchase of DuPont’s 50 percent stake in DA NanoMaterials makes it the first chemical mechanical planarization (CMP) supplier to offer a fully integrated portfolio, comprised of polishing slurries, delivery equipment, and post-CMP cleaners.
“We are pleased to complete the conversion of DA NanoMaterials and continue to build our electronic materials portfolio,” said Wayne Mitchell, Vice President and General Manager of Electronics for Air Products. “This acquisition provides additional scale and synergies to our differentiated materials within Air Products. We will continue to look for novel and cost-effective solutions for our customers going forward.”
The current market for CMP and wafer polishing slurries is valued at more than $1 billion and is growing two times as fast as the underlying semiconductor MSI index, which measures millions of square inches of silicon shipped. CMP is one of the fastest growing applications for IC semiconductors, according to Nick Robertson, Chief Executive Officer of DA NanoMaterials.
DA NanoMaterials, which has an established portfolio of colloidal silica-based products for copper CMP, tungsten CMP, and wafer polishing applications, fits neatly with Air Products’ other Electronics offerings, including its successful CoppeReady™ post- CMP cleaning series and Albuquerque, NMbased Poly-Flow Engineering, a manufacturer of advanced chemical delivery and precision cleaning equipment that the company acquired last year.
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