Electronics manufacturing is a highly complex sequence of adding and subtracting material, with the resulting sum yielding circuits sometimes less than one hundred atoms wide. For over 50 years, Moore’s Law has driven an industry to make smaller devices on larger scales.
Selective gas-phase etching – that is removing part of a single material in a particular shape – is one of the enabling processes. In this article, we give an introduction to how simple gas molecules are used to chemically cut materials into precise shapes at nano-scale dimensions.
Process
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