Oxygen analysis can be used to guarantee the continuous delivery integrity of all other UHP bulk gases. This information can protect sensitive processes in real time, without the need to shut down the entire system. Here, Curt Fauth outlines a process using ultra-trace oxygen measurements that can save UHP manufacturers considerable time and unnecessary cost.
Ultra High Purity (UHP) gases with bulk gas piping distribution systems are widely used in the semiconductor manufacturing industry. The requirements for faster, higher capacity semiconductor components are driving semiconductor process technology limits and the accepted impurities levels in UHP gases continue to reduce due to increased demands for purity in semiconductor fab processes.
Bulk gas distribution systems are therefore complex: acceptable system integrity depends upon continuous perfect operation of numerous components within the distribution system that can provide a leak path from the atmosphere, such as bad valve seats or diaphragm seals, or capped service taps accidentally left loose.
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