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Acquisition expands Ricor operations

Ricor Cryogenic & Vacuum Systems, a manufacturer of semiconductor manufacturing equipment, has acquired fellow wafer equipment developer InnerSense Ltd. and as a result, expanded its activities from cryogenic equipment and purging solutions through to diagnostic systems.

InnerSense has developed the ‘Smart Wafer’ technology that provides engineers with the means to record the forces acting on a wafer as it is handled by wafer fabrication equipment. Such an approach delivers a significant yield boost as it provides a statistical monitoring method for abnormal mechanical events in IC manufacturing and can be used as a cornerstone of an intelligent maintenance programme (High Precision Maintenance).

Following the transaction, Ricor and InnerSense will be combining forces to extend the benefits of this technology to the global semiconductor and related markets.

Yigal Tomer and Erez Harel, InnerSense’s Co-CEO’s, are pleased with the acquisition and explain, “It is very positive for InnerSense and for our customers and partners. InnerSense will continue to operate as an autonomous business unit within Ricor. Being part of a large company means we have now access to a much wider pool of resources and financial strength, enabling us to develop the best products for the upcoming challenges.”

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