Applied Energy Systems (AES) has released its SEMI-GAS® Nanoturion™ Valve Manifold Box for Dichlorosilane (DCS) to support semiconductor process equipment manufacturing and related applications.
The premier fully automatic system includes manifold heat tracing and a standalone wall-mounted heater controller to enable multi-zone heat capabilities for stabilizing the high flow rates and delivery pressures required for vaporizing and delivering DCS. The system’s inlet header and various stick zones are independently controlled to support separate process, tool, or experiment gas supplies.
This specialized Nanoturion™ valve manifold box is equipped with a GigaGuard™ GSM Fully Automatic Controller, which includes a color touchscreen interface for intuitive operator control and the ability to automate sequences for streamlined operations and maintenance. The controller features Ethernet communications, exhaust pressure monitoring, and user-configured set limits, warnings, and alarms.
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