Air Liquide has received the 2005 Eurosemi IC industry award for materials improvement for its Universal Plasma Abatement System (UPAS).
With this system, Air Liquide has developed a way to use plasma to remove gaseous perfluorocarbons (PFC), which contribute to the greenhouse effect.
Christophe Fontaine, Air Liquide Group vice president for electronics, said: “Air Liquide’s UPAS is a breakthrough in technology that has shown great operational success in reducing global warming gas emissions in production environments of our customers.
“We are proud to help our customers face their environmental challenges and to reinforce Air Liquide’s commitment to sustainable development.”
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