Air Products has extended its XeCoverySM xenon recovery service to MEMS Manufacturers, helping reduce cost of ownership for XeF2-based etching processes.
The use of xenon difluoride (XeF2) in etching processes is gaining increased acceptance by manufacturers of MicroElectroMechanical Systems (MEMS). However, the relatively high cost of the material continues to be a barrier to more widespread adoption.
Now, Air Products has extended its XeCoverySM: xenon recovery service to recover xenon from XeF2-based etching processes, which will help stabilise and even lower the price of XeF2, noted Gene Karwacki, Commercial Development Manager for XeCovery at Air Products, who was speaking at the SEMICON West 2009 Extreme Electronics TechXPOT.
“Pricing for XeF2 is strongly influenced by the availability and pricing of xenon,” said Karwacki.
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