BOC Edwards has announced its support of environmental manufacturing with the supply of multiple Zenith CVD integrated vacuum and abatement systems.
The systems will be provided to Japanese DRAM supplier Elpida Memory Inc which will install them in their new 300mm wafer fabrication facility, E300-Fab 2, scheduled for startup in December 2005.
The Zenith series provides fully-integrated abatement and vacuum pump solutions for treatment of toxic process exhaust gases and precursors in addition to handling high flows of hydrogen. The systems follow an earlier series of Zenith systems supplied for Elpida at the initial install phase of the site.
As Hiroshi Kasano, president and CEO of BOC Edwards Japan, said: A major consideration from Elpida was local support and the Zenith’s ability to address specific process requirements.
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