BOC Edwards, in conjunction with its Taiwan joint venture partner, BOC Lien Hwa (BOCLH), has begun work on the next phase of expansion of its nitrogen production and pipeline distribution network.
The cost of the project, which is located in the Hsinchu Science Park in northern Taiwan, is more than US $30m.
“This pipeline network, which has been an integral part and an enabler of the successful growth of advanced semiconductor manufacturing in Hsinchu since 1988, supplies ultra-high purity nitrogen to more than 20 advanced wafer fabrication facilities within the park,” said Neels Kriek, managing director of materials and services for BOC Edwards.
“With a currently installed capacity of more than 100,000 Nm3 per hour of nitrogen, and more than 20km of underground pipelines, this system forms the largest high purity gas distribution network in Taiwan,” he concluded.
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