Japan Air Gases (JAG), headquartered in Tokyo, has been selected by Toshiba Matsushita Display (TMD) to supply fluorine gas from an onsite generator as an alternative to the delivery of nitrogen trifluoride in cylinders.
Both fluorine gas and nitrogen trifluoride are used in the plasma and thermal cleaning of chemical vapour deposition (CVD) reactors. JAG will supply F2 gas on a long term contract basis and will help lower the cleaning costs and environmental issues related to global warming.
The fluorine generator is the first of its kind installed at a liquid crystal display (LCD) production facility in Japan and is manufactured by BOC Edwards, a division of Linde Group, one of JAGs parent companies.
Guy Salzgeber, president of JAG, commented: “JAG aims to support customers by bringing them the latest innovations in gases and equipment. The first online F2 generator that we started up at Ishikawa, with the great cooperation of TMD, is an excellent illustration of what we shall continuously strive to achieve as a company for the benefit of our customers.”
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