Linde has started up a new air separation plant to supply nitrogen, high purity oxygen and argon to the 12-inch wafer product line of Shanghai Huali Microelectronics Corporation (HLMC) in Shanghai, the world’s largest industrial gases group said today.
The company said it will also supply hydrogen and helium to HLMC.
The new plant includes on-site nitrogen generators and a compressed dry air (CDA) system.
The compact and energy efficient nitrogen generator has been specially designed by Linde to meet the increasing demands of electronics and semiconductor customers for higher purity industrial gas products.
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