After gasworld provided an insight into developments in the electronics market in its July issue and also recently reported of the possible environmental damage of NF3, news reaches us that The Linde Group now offers a unique solution to replace nitrogen trifluoride (NF3) in the production of LCD’s and solar panels.
Based on a proven technology, the innovative process utilises on-site generation of fluorine gas, making production more efficient and more environmentally friendly.
There is currently a high level of attention on the usage of NF3 by the electronics industry because of the gas’ very high global warming impact. Linde has now developed the state-of-the-art process to replace NF3 with pure fluorine however, which has a zero global warming potential.
The process is applicable to the manufacturing of flat screen TV’s and to the mass production of low cost, thin film photovoltaic cells, which convert sunlight into electricity. As well as fluorine’s environmental advantage, it also improves performance and reduces costs in the chamber cleaning process, a critical step in the manufacturing of semiconductors, flat panels, and solar cells.
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