Nitrogen trifluoride, NF3, a binary compound of nitrogen and fluorine, is a colourless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure.
It has a characteristically mouldy odour. It is a pulmonary irritant with toxicity comparable with nitrogen oxides. It may damage liver and kidneys, and is slightly soluble in water without undergoing chemical reaction.
Applications
NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. When compared with competing products, NF3 offers customers significant reductions in emissions, throughput increases of up to 30%, longer chamber life and faster clean rates.
NF3 is also stable and non-flammable, making it a safe gas to transport, store and deliver to customers around
the world.
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