Praxair has signed a long-term contract to supply nitrogen (N2), high purity oxygen (O2), helium (He) and other gases to Shanghai Huali Microelectronics Corporation (HLMC), a subsidiary of Huahong Group, based in Shanghai.
Praxair will build, own and operate two air separation plants that will provide approximately 600 tonnes per day of N2 to HLMC’s new production base in Kangqiao Industrial Park, located 15 kilometers away from their existing site at Zhangjiang Hi-tech Park in Shanghai, China.
Praxair will start to supply HLMC from the new plants in early 2018 to support the company’s commissioning and production schedule. Praxair has served its industrial gas needs at the company’s Zhangjiang site through a long-term bulk gas supply agreement since 2010.
HLMC has invested more than $5.7bn in its business and process technology supporting 28 to 14 nm nodes. Its new 12-inch wafer product line is a significant subproject of the National ‘910 Project.’ This is a major industrial and engineering programme in Shanghai, which has been included in China’s 13th five-year integrated circuit industry major productivity plan.
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