SEMI-GAS® Systems, an industry-leading provider of ultra-high purity gas delivery equipment, recently broadened the capabilities of its custom Xturion™ Blixer™ gas blender product line.
The new options include system auto-purging and a dynamic stream gas analyser to facilitate the blending of highly corrosive gases into gas mixtures, as needed in semiconductor and microelectronics fabrication processes.
Based on a preset component ratio, Blixer receives regulated process gases from two or more independent gas sources and blends them to the desired composition in the system’s on-board accumulator tank. The system then draws from the accumulator tank and delivers the uniform gas mixture through the process gas outlet to a tool or gas distribution manifold.
To oversee all of these system operations, Blixer utilises a SEMI-GAS GigaGuard™ PLC controller with an ergonomically front-mounted eight inch color touch screen. In addition, the PLC controller manages the electrical components and pneumatically actuated valves for process gas delivery and fully automated purging sequences.
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