Tiger Optics LLC, the innovative manufacturer of laser-based trace gas analysers, is unveiling an important new capability that enables detection of trace moisture (H2O) down to 100 parts-per-trillion (ppt) level in an ultra-high-purity (UHP) gas stream.
This new analyser excels in trace-level H2O detection in the various bulk and specialty gases used throughout advanced semiconductor, MEMS, LED and dIsplay manufacturing. In addition to the significantly improved detection limit, the HALO KA MaxTM offers even faster response than its lauded predecessor, the field-proven HALO KA, while retaining the same compact footprint and intuitive, graphical user interface. Likewise, the HALO KA MaxTM requires no moving parts or calibration, thanks to its powerful principle of operation: Cavity Ring-Down Spectroscopy (CRDS) – the instrument thus delivers, the very lowest cost of ownership.
Per the latest International Roadmap for Devices and Systems (IRDS) requirements and ever the pioneer, Tiger Optics embraces the challenge of assisting manufacturers to meet the mounting demands of the electronics industry. Indeed, with advanced device roadmaps calling out new materials and continuously stretching the associated metrology requirements, industry challenges, such as autonomous vehicles and the significantly increased use of memory intensive and powerful mobile devices, introduce a paradigm shift requirement to significantly reduce device failure rates – this in turn demands more and more measurements and more and more control of the manufacturing process.
The HALO KA MaxTM is on display at SEMICON West in San Francisco from 10th to 12th July.
... to continue reading you must be subscribed
