Tiger Optics LLC, manufacturer of laser-based gas analysers, will introduce three of its latest products at the SEMICON West show which is being held in San Francisco from 11th-13th July.
The company will display its HALO QRP (quite reduced pressure) moisture analyser, developed for semiconductor manufacturers using low-temperature epitaxy (LT-Epi). With the shift to lower deposition temperatures and pressures, moisture has become the main culprit in oxide defects. The HALO QRP can monitor each process step and report real-time moisture concentration to the tool control system. The device easily operates at 1 Torr or less, in comparison to the company’ HALO RP, which is limited to 50 Torr.
Tiger Optics is equally focussed on its customers’ growing concerns with ambient molecules that lead to contamination of wafers. The company has therefore developed the new T-I Max platform for continuous AMC monitoring, designed to rapidly measure a specific analyte, with no cross-contamination or interference from other chemicals in the air.
The final product to be unveiled will be the new state-of-the-art AMC mobile cart to package its analysers for cleanroom environments. The cart can accommodate up to four T-I Max analysers and is also fitted with a top-mounted central control touchscreen.
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