Edwards Vacuum, a developer and manufacturer of vacuum system products, unveiled two new vacuum pump products at the SEMICON® event taking place in China this week.
The UK-based business introduced the iXM Series for semiconductor etch and chemical vapour deposition (CVD) applications, and the iXL900R for fast pump down of large flat panel display (FPD) loadlock chambers.
The first offering, the iXM Series of dry pumps, reduces environmental impact and customer costs for etch and CVD processes with low energy consumption and ambient noise levels. The pumps are specifically designed to deliver increased lifetime when used for highly corrosive etch processes.
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