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Ultra-purification system for process gases

Innovating in the field of electronics, Matheson Tri-Gas Electronics has recently introduced its patented PICO-TRAP Ultra-Purification System, for removing volatile metal impurities and moisture from critical process gases used by semiconductor manufacturers.

The newly revealed PICO-TRAP System combines the principles of chemisorption and physisorption to achieve levels of process gas purity unmatched by conventional purification technologies.

PICO-TRAP incorporates Matheson Tri-Gas Electronics’ custom-engineered cryogenic, fully-regenerable purification column to ‘deliver one of the most impurity-free process gases available today’, the company suggests.

The system, which is one of eight finalists for SEMI’s ‘Best of West’ awards to be announced during next week’s SEMICON West trade show, enables microelectronics manufacturers to minimise impurities that interfere with process stability, which is critical to mass producing reliable electronic devices.

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