Versum Materials, Inc. and NuMat Technologies have announced a global, commercial agreement to offer a new line of products for the safe storage and delivery of dopant gases such as arsine, phosphine and boron trifluoride.
The new product line is called ION-X® and is based on revolutionary Metal Organic Frameworks (MOFs) which can selectively absorb, store and safely deliver ultrahigh purity gases at sub-atmospheric pressures.
ION-X® offers performance advantages over traditional carbon-based absorbent technology used in the ion implant processes for the manufacture of semiconductor devices.
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