The Delivery Systems and Services Group (DS&S) of Versum Materials, Inc. has sold and commissioned its 200th CHEMGUARD® Gen. III Refill System.
The product line of high purity, liquid delivery systems was launched in early 2016, with the 200 units now running in the latest high-volume semiconductor fabrication plants globally.
David Eshelman, Product Manager, explained, “The specific needs of today’s specialty, flammable or highly-energetic modules have been addressed by the unique CHEMGUARD Gen III model designs.”
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